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A Methodology for Evaluating the Technological Maturity of Micro and Nano Fabrication Processes5th IFIP WG 5.5 International Precision Assembly Seminar (IPAS), Feb 2010, Chamonix, France. pp.329-336, ⟨10.1007/978-3-642-11598-1_38⟩
Conference papers
hal-01055668v1
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Function and Length Scale Integration Study in Emerging MST-Based Products5th IFIP WG 5.5 International Precision Assembly Seminar (IPAS), Feb 2010, Chamonix, France. pp.337-342, ⟨10.1007/978-3-642-11598-1_39⟩
Conference papers
hal-01055667v1
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