Search - IFIP Open Digital Library Access content directly

Filter your results

1 Array
Structure: Internal structure identifier : 237161
hal_authIdPerson_i : 1007789
Image document

Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS

Toshiyuki Tsuchiya , Hiroyuki Tokusaki , Yoshikazu Hirai , Koji Sugano , Osamu Tabata
19th International Conference on Very Large Scale Integration (VLSISOC), Oct 2011, Hong Kong, China. pp.94-109, ⟨10.1007/978-3-642-32770-4_6⟩
Conference papers hal-01519771v1