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Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe

Daniel Smale , Steve Haley , Joel Segal , Ronaldo Ronaldo , Svetan Ratchev , et al.
5th IFIP WG 5.5 International Precision Assembly Seminar (IPAS), Feb 2010, Chamonix, France. pp.105-112, ⟨10.1007/978-3-642-11598-1_12⟩
Conference papers hal-01055695v1