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Approach for the 3D-Alignment in Micro- and Nano-scale Assembly Processes

Thomas Wich , Christian Stolle , Manuel Mikczinski , Sergej Fatikow
5th IFIP WG 5.5 International Precision Assembly Seminar (IPAS), Feb 2010, Chamonix, France. pp.167-173, ⟨10.1007/978-3-642-11598-1_19⟩
Conference papers hal-01055688v1