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Positioning, Structuring and Controlling with Nanoprecision

Regine Hedderich , Tobias Heiler , Roland Gröger , Thomas Schimmel , Stefan Walheim
5th IFIP WG 5.5 International Precision Assembly Seminar (IPAS), Feb 2010, Chamonix, France. pp.222-226, ⟨10.1007/978-3-642-11598-1_26⟩
Conference papers hal-01055681v1