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A Methodology for Evaluating the Technological Maturity of Micro and Nano Fabrication Processes

Emmanuel Brousseau , Richard Barton , Stefan Dimov , Samuel Bigot
5th IFIP WG 5.5 International Precision Assembly Seminar (IPAS), Feb 2010, Chamonix, France. pp.329-336, ⟨10.1007/978-3-642-11598-1_38⟩
Conference papers hal-01055668v1