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authFullName_s : Matthias Mohaupt
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Alignment Procedures for Micro-optics

Matthias Mohaupt , Erik Beckert , Ramona Eberhardt , Andreas Tünnermann
5th IFIP WG 5.5 International Precision Assembly Seminar (IPAS), Feb 2010, Chamonix, France. pp.143-150, ⟨10.1007/978-3-642-11598-1_16⟩
Conference papers hal-01055691v1
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Precisely Assembled Multi Deflection Arrays – Key Components for Multi Shaped Beam Lithography

Matthias Mohaupt , Erik Beckert , Thomas Burkhardt , Marcel Hornaff , Christoph Damm , et al.
6th International Precision Assembly Seminar (IPAS), Feb 2012, Chamonix, France. pp.42-50, ⟨10.1007/978-3-642-28163-1_6⟩
Conference papers hal-01363878v1