In recent years, the application of TRIZ methodology in the process engineering has been found promising to develop comprehensive inventive solution concepts for process intensification (PI). However, the effectiveness of TRIZ for PI is not measured or estimated. The paper describes an approach to evaluate the efficiency of TRIZ application in process intensification by comparing six case studies in the field of chemical, pharmaceutical, ceramic, and mineral industries. In each case study, TRIZ workshops with the teams of researchers and engineers has been performed to analyze initial complex problem situation, to identify problems, to generate new ideas, and to create solution concepts. The analysis of the workshop outcomes estimates fulfilment of the PI-goals, impact of secondary problems, variety and efficiency of ideas and solution concepts. In addition to the observed positive effect of TRIZ application, the most effective inventive principles for process engineering have been identified.