Development of the Roll Type Incremental Micro Pattern Imprint System for Large Area Pattern Replication
Abstract
Flexible display has been attracting attention in
the research field of next generation display in recent years. And
polymer is a candidate material for flexible displays as it takes
advantages including transparency, light weight, flexibility and so on.
Rolling process is suitable and competitive process for the high
throughput of flexible substrate such as polymer. In this paper, we
developed a prototype of roll-to-flat (R2F) thermal imprint system for
large area micro pattern replication process, which is one the key
process in the fabrication of flexible displays. Tests were conducted to
evaluate the system feasibility and process parameters effect, such as
flat mold temperature, loading pressure and rolling speed. 100 mm × 100
mm stainless steel flat mold and commercially available polycarbonate
sheets were used for tests and results showed that the developed R2F
system is suitable for fabrication of various micro devices with micro
pattern replication on large area.
Origin | Files produced by the author(s) |
---|
Loading...