This paper describes the development of an analytical model to describe a novel three-axis vibrating micro-scale probe for micro-co-ordinate measuring machines (micro-CMMs). The micro-CMM probe is vibrated in three axes, in order to address the problems inherent with micro- and nano-scale co-ordinate measurements caused by surface interaction forces. These surface forces have been investigated and a mathematical model describing an ideal probing situation has been developed. The vibration amplitude required for the probe to overcome the surface interaction forces has been calculated using this model. The results of initial vibration experiments are reported and the suitability of the probe to counteract the surface interaction forces is confirmed.