Low Voltage Thermo-mechanically Driven Monolithic Microgripper with Piezoresistive Feedback
Abstract
Pick-and-place of micro/nano sized objects means
handling of very tiny and very different in properties objects having
specific behavior. Besides formal requirements of assembly processes,
the tools for controllable manipulation with these objects should not
affect the examined micro/nano environment, i.e. should be "small and
passive" in any sense. Despite of the recent progress, most available
micro-grippers are still suffering of high voltage power supply
required, short lifetime, low detection sensitivity and high price.
Prototypes of a newly designed micro-gripper, having advantages over the
existing analogues, have been developed, experimentally studied, and
presented in this paper. The envisaged microgripper is of
normally-closed type with thermo-mechanically driven actuator and
piezoresistive arm-displacement feedback. The thermo actuator is placed
between gripper's arms and consists of double-folded highly-doped
compliant silicon beam. As low average voltage vs. arm displacement
value as 1V/μm, was experimentally measured.
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Digital Libraries [cs.DL]Origin | Files produced by the author(s) |
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