Precision Assembling and Hybrid Bonding for Micro Fluidic Systems
Abstract
An automated process is described to assemble highly
functionalized micro fluidic cartridges. Different materials such as
glass, silicon and thermoplastics can be bonded using adhesive gaskets.
The assembling and bonding sequence is realized at room temperature so
that the biological function of the cartridge is fully preserved.
Several control tests for alignment and orientation are integrated into
the process so that a precise and reliable assembly using robotic
equipment can be achieved.
Domains
Digital Libraries [cs.DL]Origin | Files produced by the author(s) |
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